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Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control /
Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processin...
| Clasificación: | Libro Electrónico |
|---|---|
| Autor principal: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Westwood, N.J. :
Noyes Publications,
�1998.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
| LEADER | 00000cam a2200000 a 4500 | ||
|---|---|---|---|
| 001 | SCIDIR_ocm49708622 | ||
| 003 | OCoLC | ||
| 005 | 20231117015142.0 | ||
| 006 | m o d | ||
| 007 | cr un||||||||| | ||
| 008 | 011106s1998 njua obf 001 0 eng d | ||
| 010 | |z 97044664 | ||
| 040 | |a KNOVL |b eng |e pn |c KNOVL |d OCLCQ |d TEF |d DEBSZ |d OCLCQ |d KNOVL |d ZCU |d KNOVL |d OCLCF |d OCLCQ |d OCLCO |d OPELS |d UWW |d KNOVL |d OCL |d OCLCQ |d VT2 |d OCLCQ |d BUF |d D6H |d CEF |d RRP |d AU@ |d WYU |d LEAUB |d COM |d OCLCO |d OCLCQ |d COA |d OCLCO | ||
| 019 | |a 49270322 |a 281593731 |a 639757318 |a 961887604 |a 988713919 |a 999474605 |a 1057972107 |a 1065923630 |a 1340058153 | ||
| 020 | |a 1591240794 |q (electronic bk.) | ||
| 020 | |a 9781591240792 |q (electronic bk.) | ||
| 020 | |a 9780815514220 | ||
| 020 | |a 0815514220 | ||
| 024 | 8 | |a (WaSeSS)ssj0000072232 | |
| 035 | |a (OCoLC)49708622 |z (OCoLC)49270322 |z (OCoLC)281593731 |z (OCoLC)639757318 |z (OCoLC)961887604 |z (OCoLC)988713919 |z (OCoLC)999474605 |z (OCoLC)1057972107 |z (OCoLC)1065923630 |z (OCoLC)1340058153 | ||
| 050 | 4 | |a TS695 |b .M38 1998eb | |
| 082 | 0 | 4 | |a 671.7/35021 |2 22 |
| 100 | 1 | |a Mattox, D. M. | |
| 245 | 1 | 0 | |a Handbook of physical vapor deposition (PVD) processing : |b film formation, adhesion, surface preparation and contamination control / |c by Donald M. Mattox. |
| 260 | |a Westwood, N.J. : |b Noyes Publications, |c �1998. | ||
| 300 | |a 1 online resource (xxvii, 917 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 520 | |a Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processing. Also covers the more widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 588 | 0 | |a Print version record. | |
| 505 | 0 | |a Introduction -- Substrate (""Real"") Surfaces and Surface Modification -- The Low-Pressure Gas and Vacuum Processing Environment -- The Low-Pressure Plasma Processing Environment -- Vacuum Evaporation and Vacuum Deposition -- Physical Sputtering and Sputter Deposition (Sputtering) -- Arc Vapor Deposition -- Ion Plating and Ion Beam Assisted Deposition -- Atomistic Film Growth and Some Growth-Related Film Properties -- Film Characterization and Some Basic Film Properties -- Addhesion and Deadhesion -- Cleaning -- External Processing Environment -- APPENDIX 1: Reference Material -- APPENDIX 2: Transfer of Technology from R & D to Manufacturing -- Glossary of Terms and Acronyms Used in Surface Engineering. | |
| 546 | |a English. | ||
| 650 | 0 | |a Vapor-plating |v Handbooks, manuals, etc. | |
| 650 | 7 | |a Vapor-plating |2 fast |0 (OCoLC)fst01164135 | |
| 650 | 7 | |a Galvanoplastia. |2 larpcal | |
| 650 | 7 | |a Manuais. |2 larpcal | |
| 655 | 2 | |a Handbook |0 (DNLM)D020479 | |
| 655 | 7 | |a handbooks. |2 aat |0 (CStmoGRI)aatgf300311807 | |
| 655 | 7 | |a Handbooks and manuals |2 fast |0 (OCoLC)fst01423877 | |
| 655 | 7 | |a Handbooks and manuals. |2 lcgft | |
| 655 | 7 | |a Guides et manuels. |2 rvmgf |0 (CaQQLa)RVMGF-000001065 | |
| 776 | 0 | 8 | |i Print version: |a Mattox, D.M. |t Handbook of physical vapor deposition (PVD) processing. |d Westwood, N.J. : Noyes Publications, �1998 |z 0815514220 |w (DLC) 97044664 |w (OCoLC)37806270 |
| 856 | 4 | 0 | |u https://sciencedirect.uam.elogim.com/science/book/9780815514220 |z Texto completo |