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Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control /

Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processin...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Mattox, D. M.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Westwood, N.J. : Noyes Publications, �1998.
Temas:
Acceso en línea:Texto completo

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