Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control /
Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processin...
Clasificación: | Libro Electrónico |
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Autor principal: | |
Formato: | Electrónico eBook |
Idioma: | Inglés |
Publicado: |
Westwood, N.J. :
Noyes Publications,
�1998.
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Temas: | |
Acceso en línea: | Texto completo |