Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /

Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Mate...

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Detalles Bibliográficos

Clasificación:	Libro Electrónico
Autor Corporativo:	International Conference on MEMS and Nanotechnology Shenzhen, China
Otros Autores:	Liu, Changhui (Editor )
Formato:	Electrónico Congresos, conferencias eBook
Idioma:	Inglés
Publicado:	Zurich, Switzerland : Trans Tech Publications, [2014]
Colección:	Advanced materials research ; v. 901.
Temas:	Microelectromechanical systems > Congresses. Nanotechnology > Congresses. Microsystèmes électromécaniques > Congrès. Nanotechnologie > Congrès. TECHNOLOGY & ENGINEERING > Mechanical. Microelectromechanical systems Nanotechnology Conference papers and proceedings
Acceso en línea:	Texto completo