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|a International Conference on MEMS and Nanotechnology
|d (2014 :
|c Shenzhen, China)
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|a Material Science and MEMS Production :
|b Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /
|c edited by Changhui Liu.
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264 |
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1 |
|a Zurich, Switzerland :
|b Trans Tech Publications,
|c [2014]
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264 |
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|c ©2014
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300 |
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|a 1 online resource (117 pages) :
|b illustrations (some color), graphs, photographs
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|a Advanced Materials Research,
|x 1662-8985 ;
|v vol. 901
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504 |
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|a Includes bibliographical references and indexes.
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|a Online resource; title from PDF title page (ebrary, viewed March 20, 2014).
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|a Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Materials Science, Processing and Application, MEMS Design and Production.
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|a Material Science and MEMS Production; Preface and Organizing Committee; Table of Contents; Chapter 1: Materials Science, Processing and Application; Surface Effects on the Buckling of Nanowires Based on Modified Core-Shell Model; A Comparison Study of Fire Resistance of High Strength Structural Steels According to Boundary Condition; TMAH Etching of Silicon Wafer for Detector Fabrication; Phase-Shifted Bragg Gratings Based on Hybrid Plasmonics Structure; Surface Enhanced Raman Scattering Based on Dielectric-Loaded Surface Plasmon Polariton Waveguides
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505 |
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|a A Novel System for Fine Particle Concentration MeasurementPolymerization of Acrylamide Photo Initiated by Ferroferric Oxide Nanoparticles; The Drug Loading Thermodynamics Mechanism of Eight Cationic Drugs' Adsorption onto Ion Exchange Fiber; Removal of Heavy Metal Ions with Hacac-Silica; Investigation of Room Temperature Photoluminescence of ZnO Films Induced by Different Laser Fluence Irradiation; The Desalination Device Using the Rising Liquid Film on the Microscale Fluted Surface of Horizontal Tubes
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505 |
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|a Long-Range Air-Hole Assisted Subwavelength Waveguides: Towards Large-Scale Photonic IntegrationChapter 2: MEMS Design and Production; A Novel Filtering Method for the Random Drift of MEMS Gyroscope; Research on a Novel Compensation Algorithm for MEMS Sub-Pixel Displacement Measurement; The Impact Response Characteristics Research of the Multilayer Structure, Cantilever-Type Electrothermal Actuator Based on MEMS; Theoretical Method Research on a MEMS Safety and Arming Device; Simulation Research on Micro-Milling Process Based on ABAQUS
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|a RF MEMS for Reconfigurable RF Front-End: Research in AustraliaDesign of Projection Lithography Objective Lens with Sub-Ten Micrometer Line-Width and its MTF Experimental Measurements; Keywords Index; Authors Index
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546 |
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|a English.
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590 |
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|a eBooks on EBSCOhost
|b EBSCO eBook Subscription Academic Collection - Worldwide
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650 |
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|a Microelectromechanical systems
|v Congresses.
|
650 |
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0 |
|a Nanotechnology
|v Congresses.
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650 |
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|a Microsystèmes électromécaniques
|v Congrès.
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650 |
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6 |
|a Nanotechnologie
|v Congrès.
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650 |
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|a TECHNOLOGY & ENGINEERING
|x Mechanical.
|2 bisacsh
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|a Nanotechnology
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|a Conference papers and proceedings
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|a Liu, Changhui,
|e editor.
|
776 |
0 |
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|i Print version:
|t Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China.
|d Zurich, Switzerland : TTP, ©2014
|h 120 pages
|k Advanced materials research ; Volume 901
|x 1662-8985
|z 9783038350477
|
830 |
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|a Advanced materials research ;
|v v. 901.
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