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Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /

Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Mate...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: International Conference on MEMS and Nanotechnology Shenzhen, China
Otros Autores: Liu, Changhui (Editor )
Formato: Electrónico Congresos, conferencias eBook
Idioma:Inglés
Publicado: Zurich, Switzerland : Trans Tech Publications, [2014]
Colección:Advanced materials research ; v. 901.
Temas:
Acceso en línea:Texto completo

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