Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China /

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Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Mate...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: International Conference on MEMS and Nanotechnology Shenzhen, China
Otros Autores: Liu, Changhui (Editor )
Formato: Electrónico Congresos, conferencias eBook
Idioma:Inglés
Publicado: Zurich, Switzerland : Trans Tech Publications, [2014]
Colección:Advanced materials research ; v. 901.
Temas:
Microelectromechanical systems > Congresses.
Nanotechnology > Congresses.
Microsystèmes électromécaniques > Congrès.
Nanotechnologie > Congrès.
TECHNOLOGY & ENGINEERING > Mechanical.
Microelectromechanical systems
Nanotechnology
Conference papers and proceedings
Acceso en línea:Texto completo
Descripción
Sumario:Collection of selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China. The 19 papers are grouped as follows: Chapter 1: Materials Science, Processing and Application, Chapter 2: MEMS Design and Production Keyword: Materials Science, Processing and Application, MEMS Design and Production.
Descripción Física:1 online resource (117 pages) : illustrations (some color), graphs, photographs
Bibliografía:Includes bibliographical references and indexes.
ISBN:9783038264286
3038264288
ISSN:1662-8985 ;
1662-8985

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