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Fabrication and design of resonant microdevices /
This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, a...
| Call Number: | Libro Electrónico |
|---|---|
| Main Author: | |
| Format: | Electronic eBook |
| Language: | Inglés |
| Published: |
Norwich, NY :
W. Andrew Inc.,
�2008.
|
| Series: | Micro & nano technologies ;
3. |
| Subjects: | |
| Online Access: | Texto completo |
Table of Contents:
- Introduction; Microfabrication; Actuation mechanisms; Sensing techniques; Modeling; Damping mechanisms; Interfacing; Noise; Packaging; Survey of applications.