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Fabrication and design of resonant microdevices /
This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, a...
| Cote: | Libro Electrónico |
|---|---|
| Auteur principal: | |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Norwich, NY :
W. Andrew Inc.,
�2008.
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| Collection: | Micro & nano technologies ;
3. |
| Sujets: | |
| Accès en ligne: | Texto completo |