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Industrial micro & nano fabrication /
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industr...
| Cote: | Libro Electrónico |
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| Auteur principal: | |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Norwich, N.Y. : Oxford :
William Andrew ; Elsevier Science [distributor],
2010.
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| Collection: | Micro and nano technologies series
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| Sujets: | |
| Accès en ligne: | Texto completo |