Ion implantation technology-92 : proceedings of the Ninth International Conference on Ion Implantation Technology, Gainesvile, FL, USA, September 20-24, 1992 /

Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present need for accurate models in ion implanted species will become absolutely vital in the future due to shrinking feature sizes. Successful wi...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor Corporativo: International Conference on Ion Implantation Technology Gainesville, Fla.
Otros Autores: Downey, D. F.
Formato: Electrónico Congresos, conferencias eBook
Idioma:Inglés
Publicado: Amsterdam ; New York : North-Holland, 1993.
Temas:
Semiconductors > Congresses.
Ion implantation > Congresses.
Semiconductor doping > Congresses.
Semi-conducteurs > Congr�es.
Ions > Implantation > Congr�es.
Semi-conducteurs > Dopage > Congr�es.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
Ion implantation
Semiconductor doping
Semiconductors
Congress
proceedings (reports)
Conference papers and proceedings
Conference papers and proceedings.
Actes de congr�es.
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