Ion implantation technology-92 : proceedings of the Ninth International Conference on Ion Implantation Technology, Gainesvile, FL, USA, September 20-24, 1992 /
Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present need for accurate models in ion implanted species will become absolutely vital in the future due to shrinking feature sizes. Successful wi...
Clasificación: | Libro Electrónico |
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Formato: | Electrónico Congresos, conferencias eBook |
Idioma: | Inglés |
Publicado: |
Amsterdam ; New York :
North-Holland,
1993.
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Acceso en línea: | Texto completo |