Developments in surface contamination and cleaning. Volume three, Methods for removal of particle contaminants /

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The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate mater...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Kohli, Rajiv, Mittal, Kashmiri L.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Oxford ; Burlington, MA : William Andrew, ©2011.
Edición:1st ed.
Temas:
Surfaces (Technology)
Surface contamination > Prevention.
Particles > Measurement.
Cleaning.
Coatings.
Dust control.
Surfaces (Technologie)
Nettoyage.
Revêtements.
Poussière > Lutte contre.
cleaning.
coating (material)
TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS.
Cleaning
Coatings
Dust control
Particles > Measurement
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