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Developments in surface contamination and cleaning. Volume 8, Cleaning techniques /
As device sizes in the semiconductor industries shrink, devices become more vulnerable to smaller contaminant particles, and most conventional cleaning techniques employed in the industry are not effective at smaller scales. The book series Developments in Surface Contamination and Cleaning as a who...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Amsterdam :
William Andrew,
2015.
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| Edición: | First edition. |
| Colección: | Developments in Surface Contamination and Cleaning Series ;
Volume 8 |
| Temas: | |
| Acceso en línea: | Texto completo (Requiere registro previo con correo institucional) |