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Developments in surface contamination and cleaning. Volume three, Methods for removal of particle contaminants /

The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate mater...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Kohli, Rajiv, Mittal, Kashmiri L.
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Oxford ; Burlington, MA : William Andrew, ©2011.
Edición:1st ed.
Temas:
Acceso en línea:Texto completo
Descripción
Sumario:The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area. The purpose of the Developments in Surface Contamination and Cleaning series is to provide.
Descripción Física:1 online resource
Bibliografía:Includes bibliographical references and index.
ISBN:9781437778861
1437778860
1437778852
9781437778854
9781283171441
1283171449
Acceso:Access restricted to Ryerson students, faculty and staff.