Nanofabrication : fundamentals and applications /

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Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is v...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Otros Autores: Tseng, A. A. (Ampere A.)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Singapore ; Hackensack, NJ : World Scientific, ©2008.
Temas:
Nanostructured materials.
Nanostructures.
Scanning probe microscopy.
Lithography, Electron beam.
Nanostructures
Microscopy, Scanning Probe
Nanomatériaux.
Microscopie à sonde à balayage.
Lithographie par faisceau d'électrons.
TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS.
Lithography, Electron beam
Nanostructured materials
Scanning probe microscopy
Materials Science.
Atomic Physics.
Physics.
Chemical & Materials Engineering.
Engineering & Applied Sciences.
Physical Sciences & Mathematics.
Acceso en línea:Texto completo
Tabla de Contenidos:
  • Ch. 1. Atom, molecule, and nanocluster manipulations for nanostructure fabrication using scanning probe microscopy / A.A. Tseng [and others]
  • ch. 2. Atomic force microscope lithography / N. Kawasegi [and others]
  • ch. 3. Scanning probe arrays for nanoscale imaging, sensing, and modification / C. Santschi [and others]
  • ch. 4. Using biomolecules for self-assembly of engineered nano-scale structures and devices / R. Mehta, J. Lund, and B.A. Parviz
  • ch. 5. Nanofabrication based on self-assembled alumina templates / S. Sen and N.A. Kouklin
  • ch. 6. Nanowire assembly and integration / Z. Gu and D.H. Gracias
  • ch. 7. Taper-drawing fabrication of glass nanowires / L. Tong and E. Mazur
  • ch. 8. Extreme ultraviolet lithography / H. Kinoshita
  • ch. 9. Electron projection lithography / T. Miura [and others]
  • ch. 10. Electron beam direct writing / K. Yamazaki
  • ch. 11. Electron beam induced deposition / K. Mitsuishi
  • ch. 12. High-resolution electron-beam-induced deposition / P.A. Crozier and C.W. Hagen
  • ch. 13. Focused ion beams and interaction with solids / T. Ishitani, T. Ohnishi, and T. Yaguchi
  • ch. 14. Nano/microstructuring of ceramic surfaces by unconventional lithographic methods / R.C. Salvarezza and O. Azzaroni
  • ch. 15. Alternative nanofabrication approaches for non-CMOS applications / C.V. Cojocaru, F. Cicoira, and F. Rosei
  • ch. 16. Nanofabrication of nanoelectromechanical systems (NEMS): emerging techniques / K.L. Ekinci and J. Brugger.

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