Interfacial Compatibility in Microelectronics Moving Away from the Trial and Error Approach /

Interfaces between dissimilar materials are met everywhere in microelectronics and microsystems. In order to ensure faultless operation of these highly sophisticated structures, it is mandatory to have fundamental understanding of materials and their interactions in the system. In this difficult tas...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autores principales: Laurila, Tomi (Autor), Vuorinen, Vesa (Autor), Paulasto-Kröckel, Mervi (Autor), Turunen, Markus (Autor), Mattila, Toni T. (Autor), Kivilahti, Jorma (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: Electrónico eBook
Idioma:Inglés
Publicado: London : Springer London : Imprint: Springer, 2012.
Edición:1st ed. 2012.
Colección:Microsystems
Temas:
Microtechnology.
Microelectromechanical systems.
Surfaces (Technology).
Thin films.
Optical materials.
Microsystems and MEMS.
Surfaces, Interfaces and Thin Film.
Optical Materials.
Acceso en línea:Texto Completo

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