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Handbook of silicon based MEMS materials and technologies /
The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains...
| Call Number: | Libro Electrónico |
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| Other Authors: | |
| Format: | Electronic eBook |
| Language: | Inglés |
| Published: |
London, UK :
William Andrew is an imprint of Elsevier,
2015.
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| Edition: | Second edition. |
| Series: | Micro & nano technologies.
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| Subjects: | |
| Online Access: | Texto completo |