Handbook of silicon based MEMS materials and technologies /

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The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Tilli, Markku (Editor)
Format: Electronic eBook
Language:Inglés
Published: London, UK : William Andrew is an imprint of Elsevier, 2015.
Edition:Second edition.
Series:Micro & nano technologies.
Subjects:
Microelectromechanical systems.
Microelectromechanical systems > Materials.
Silicon > Electric properties.
Micro-Electrical-Mechanical Systems
Microsyst�emes �electrom�ecaniques.
Microsyst�emes �electrom�ecaniques > Mat�eriaux.
TECHNOLOGY & ENGINEERING > Mechanical.
Microelectromechanical systems
Microelectromechanical systems > Materials
Silicon > Electric properties
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