Cita APA (7a ed.)

Tilli, M. (2015). Handbook of silicon based MEMS materials and technologies (Second edition.). William Andrew is an imprint of Elsevier.

Cita Chicago Style (17a ed.)

Tilli, Markku. Handbook of Silicon Based MEMS Materials and Technologies. Second edition. London, UK: William Andrew is an imprint of Elsevier, 2015.

Cita MLA (8a ed.)

Tilli, Markku. Handbook of Silicon Based MEMS Materials and Technologies. Second edition. William Andrew is an imprint of Elsevier, 2015.