Plasma sources for thin film deposition and etching /

Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Francombe, Maurice H. (Editor), Vossen, John L. (Editor)
Format: Electronic eBook
Language:Inglés
Published: San Diego, CA. : Academic Press, 1994.
Series:Physics of thin films ; volume 18.
Subjects:
Thin films.
Couches minces.
Thin films
D�unne Schicht
Herstellung
Plasmaanlage
�Atzen
Projection au plasma.
Technique des plasmas.
Congress
proceedings (reports)
Conference papers and proceedings
Conference papers and proceedings.
Actes de congr�es.
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