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New approaches to image processing based failure analysis of nano-scale ULSI devices /
New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance...
| Clasificación: | Libro Electrónico |
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| Autor principal: | |
| Otros Autores: | , |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Oxford :
William Andrew,
2014.
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| Colección: | Micro & nano technologies.
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| Temas: | |
| Acceso en línea: | Texto completo |
Tabla de Contenidos:
- Front Cover; New Approaches to Image Processing based Failure Analysis of Nano-Scale ULSI Devices; Copyright Page; Contents; Preface; 1 Introduction; 1.1 Basics of Image Processing; 1.1.1 Introduction to Image Processing; 1.1.2 Histograms; 1.1.3 Spatial Filtering; 1.1.4 Fourier Analysis; 1.2 The Problems of Shrinking Feature Size in ULSI Development and Failure Analysis; 1.3 High Resolution Imaging of Structures; 1.4 Fabrication Techniques in ULSI Industry; References; 2 New Image Processing Methods for Advanced Metallization in Micro- and Nano-Electronics
- 2.1 Characteristics of Metal Ultrathin Films' Microstructures2.2 Increased Productivity by Obviating Steps of Selection of Measurement Conditions; 2.2.1 Introduction; 2.2.2 The Novel Algorithm; 2.3 Demonstration of Method Capabilities; References; 3 New Super Resolving Techniques and Methods for Microelectronics; 3.1 The basics of super resolution; 3.1.1 Introduction; 3.1.2 Fundamental limits to resolution improvement; 3.1.3 Diffractive optical superresolution; 3.1.4 Geometrical superresolution; 3.1.4.1 Sampling density; 3.1.4.2 Nonideal sampling; 3.1.4.3 Image sequence approaches
- 3.1.4.4 Approach involving physical components3.1.4.5 Digital processing methods; 3.1.5 Wigner Transform; 3.1.5.1 Wigner of sampled signals; 3.1.5.2 Wigner of microscanned signals; 3.1.5.3 Nonideal sampling; 3.1.5.4 Geometrical super resolution; 3.2 Super-Resolution Imaging for Improved Failure Analysis; 3.2.1 Resolution limit in failure analysis; 3.2.2 Super Resolving Algorithm; 3.2.3 Experimental Results; 3.3 Usage of Radon Transform for Improved Failure Analysis; 3.3.1 The Radon Transform theory; 3.3.2 Failure analysis based upon Radon transform; 3.3.3 The Algorithm