New approaches to image processing based failure analysis of nano-scale ULSI devices /

New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance...

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Detalles Bibliográficos
Clasificación:Libro Electrónico
Autor principal: Zalevsky, Zeev
Otros Autores: Livshits, Pavel, Gur, Eran
Formato: Electrónico eBook
Idioma:Inglés
Publicado: Oxford : William Andrew, 2014.
Colección:Micro & nano technologies.
Temas:
Integrated circuits > Ultra large scale integration > Testing.
Nanoelectronics.
Microelectronics.
Miniaturization
Nano�electronique.
Micro�electronique.
microelectronics.
TECHNOLOGY & ENGINEERING > Mechanical.
Integrated circuits > Ultra large scale integration > Testing
Microelectronics
Nanoelectronics
Acceso en línea:Texto completo
Descripción
Sumario:New Approaches to Image Processing Based Failure Analysis of Nano-Scale ULSI Devices introduces the reader to transmission and scanning microscope image processing for metal and non-metallic microstructures. Engineers and scientists face the pressing problem in ULSI development and quality assurance: microscopy methods can't keep pace with the continuous shrinking of feature size in microelectronics. Nanometer scale sizes are below the resolution of light, and imaging these features is nearly impossible even with electron microscopes, due to image noise.
Descripción Física:1 online resource (179 pages)
Bibliografía:Includes bibliographical references.
ISBN:9780323241434
0323241433
9780128000175
0128000171

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