Ion implantation and beam processing /

Ion Implantation and Beam Processing covers the scientific and technological advances in the fields of ion implantation and beam processing. The book discusses the amorphization and crystallization of semiconductors; the application of the Boltzmann transport equation to ion implantation in semicond...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Williams, James S. (James Stanislaus), 1948-, Poate, J. M.
Format: Electronic eBook
Language:Inglés
Published: Sydney ; New York : Academic Press, 1984.
Subjects:
Ion implantation.
Ion bombardment.
Semiconductor doping.
Electron beams.
Ions > Implantation.
Bombardement ionique.
Semi-conducteurs > Dopage.
Faisceaux �electroniques.
TECHNOLOGY & ENGINEERING > Mechanical.
Electron beams
Ion bombardment
Ion implantation
Semiconductor doping
Ionenimplantation
Semiconductors > Implantation of ions
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