Fine line lithography /

Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Newman, Roger
Format: Electronic eBook
Language:Inglés
Published: Amsterdam ; New York : New York : North-Holland Pub. Co. ; Sole distributor for the USA and Canada, Elsevier North-Holland, 1980.
Series:Materials processing, theory and practices ; v. 1.
Subjects:
Integrated circuits > Large scale integration.
Lithography.
Circuits int�egr�es �a grande �echelle.
Lithographie.
lithography.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
Integrated circuits > Large scale integration
Lithography
Integrierte Schaltung
Lithographie par faisceau d'�electrons.
Lithographie par rayons X.
Photolithographie (Halbleitertechnologie)
Online Access:Texto completo
Texto completo
Description
Physical Description:1 online resource (vii, 481 pages)
Bibliography:Includes bibliographical references and index.
ISBN:9780444853516
0444853510
9780444601285
0444601287
1299537200
9781299537200

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