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Fine line lithography /

Bibliographic Details
Call Number:	Libro Electrónico
Other Authors:	Newman, Roger
Format:	Electronic eBook
Language:	Inglés
Published:	Amsterdam ; New York : New York : North-Holland Pub. Co. ; Sole distributor for the USA and Canada, Elsevier North-Holland, 1980.
Series:	Materials processing, theory and practices ; v. 1.
Subjects:	Integrated circuits > Large scale integration. Lithography. Circuits int�egr�es �a grande �echelle. Lithographie. lithography. TECHNOLOGY & ENGINEERING > Electronics > Digital. TECHNOLOGY & ENGINEERING > Electronics > Microelectronics. Integrated circuits > Large scale integration Lithography Integrierte Schaltung Lithographie par faisceau d'�electrons. Lithographie par rayons X. Photolithographie (Halbleitertechnologie)
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