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Thin film processes /
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the p...
| Call Number: | Libro Electrónico |
|---|---|
| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | Inglés |
| Published: |
New York :
Academic Press,
1978.
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| Subjects: | |
| Online Access: | Texto completo |