Handbook of VLSI microlithography : principles, technology, and applications /

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This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Glendinning, William B., Helbert, John N.
Format: Electronic eBook
Language:Inglés
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, �1991.
Series:Materials science and process technology series.
Subjects:
Integrated circuits > Very large scale integration.
Microlithography.
Circuits int�egr�es �a tr�es grande �echelle.
Microlithographie.
TECHNOLOGY & ENGINEERING > Mechanical.
VLSI
Lithographie (Halbleitertechnologie)
Photolithographie (Halbleitertechnologie)
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