Handbook of VLSI microlithography : principles, technology, and applications /

Afficher d'autres versions (2)

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme...

Description complète

Détails bibliographiques
Cote:Libro Electrónico
Autres auteurs: Glendinning, William B., Helbert, John N.
Format: Électronique eBook
Langue:Inglés
Publié: Park Ridge, N.J., U.S.A. : Noyes Publications, �1991.
Collection:Materials science and process technology series.
Sujets:
Integrated circuits > Very large scale integration.
Microlithography.
Circuits int�egr�es �a tr�es grande �echelle.
Microlithographie.
TECHNOLOGY & ENGINEERING > Mechanical.
VLSI
Lithographie (Halbleitertechnologie)
Photolithographie (Halbleitertechnologie)
Accès en ligne:Texto completo

Internet

Texto completo

Error inesperado del formato de respuesta.
Informations d'exemplaires de

Documents similaires