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Handbook of silicon based MEMS : materials & technologies /
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materi...
| Cote: | Libro Electrónico |
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| Autres auteurs: | |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Norwich, N.Y. : Oxford :
William Andrew ; Elsevier Science [distributor],
2010.
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| Collection: | Micro & nano technologies.
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| Sujets: | |
| Accès en ligne: | Texto completo |