Comprehensive microsystems /

Provides an overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications.

Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Gianchandani, Yogesh B., Tabata, Osamu, 1956-, Zappe, Hans P.
Format: Electronic eBook
Language:Inglés
Published: Amsterdam ; Oxford : Elsevier, �2008.
Subjects:
Microelectromechanical systems.
Micro-Electrical-Mechanical Systems
Microsyst�emes �electrom�ecaniques.
Electrical & Computer Engineering.
Electrical Engineering.
Engineering & Applied Sciences.
Online Access:Texto completo
Table of Contents:
  • v. 1. Materials ; Fabrication and packaging ; Electronics and systems design
  • v. 2. Actuation mechanism ; Physical sensing ; Chemical and biological systems
  • v. 3. Optical systems ; Industrial applications ; Emerging topics ; Index.

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