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Comprehensive microsystems /

Provides an overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications.

Détails bibliographiques
Cote:Libro Electrónico
Autres auteurs: Gianchandani, Yogesh B., Tabata, Osamu, 1956-, Zappe, Hans P.
Format: Électronique eBook
Langue:Inglés
Publié: Amsterdam ; Oxford : Elsevier, �2008.
Sujets:
Accès en ligne:Texto completo