|
|
|
|
LEADER |
00000cam a22000004a 4500 |
001 |
SCIDIR_ocn225171209 |
003 |
OCoLC |
005 |
20231117015103.0 |
006 |
m o d |
007 |
cr mn||||||||| |
008 |
080417s2008 ne a ob 001 0 eng d |
040 |
|
|
|a STF
|b eng
|e pn
|c STF
|d STF
|d OKU
|d OPELS
|d OCLCQ
|d UIU
|d OCLCF
|d UIU
|d YDXCP
|d GGVRL
|d OCLCQ
|d D6H
|d LEAUB
|d CUV
|d SNU
|d VLY
|d OCLCO
|d OCLCQ
|
019 |
|
|
|a 527382962
|a 656361204
|a 771916869
|a 1162498534
|
020 |
|
|
|a 9780444521903
|
020 |
|
|
|a 0444521909
|
020 |
|
|
|z 9780444521941
|q (hbk.)
|
020 |
|
|
|z 0444521941
|q (hbk.)
|
035 |
|
|
|a (OCoLC)225171209
|z (OCoLC)527382962
|z (OCoLC)656361204
|z (OCoLC)771916869
|z (OCoLC)1162498534
|
050 |
|
4 |
|a TK7875
|b .C66 2008
|
082 |
0 |
4 |
|a 621.381
|2 22
|
245 |
0 |
0 |
|a Comprehensive microsystems /
|c editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe.
|
260 |
|
|
|a Amsterdam ;
|a Oxford :
|b Elsevier,
|c �2008.
|
300 |
|
|
|a 1 online resource (3 volumes) :
|b illustrations (some color)
|
336 |
|
|
|a text
|b txt
|2 rdacontent
|
337 |
|
|
|a computer
|b c
|2 rdamedia
|
338 |
|
|
|a online resource
|b cr
|2 rdacarrier
|
505 |
0 |
|
|a v. 1. Materials ; Fabrication and packaging ; Electronics and systems design -- v. 2. Actuation mechanism ; Physical sensing ; Chemical and biological systems -- v. 3. Optical systems ; Industrial applications ; Emerging topics ; Index.
|
504 |
|
|
|a Includes bibliographical references and index.
|
588 |
0 |
|
|a Print version record.
|
520 |
|
|
|a Provides an overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications.
|
546 |
|
|
|a English.
|
650 |
|
0 |
|a Microelectromechanical systems.
|
650 |
|
2 |
|a Micro-Electrical-Mechanical Systems
|0 (DNLM)D055617
|
650 |
|
6 |
|a Microsyst�emes �electrom�ecaniques.
|0 (CaQQLa)201-0327119
|
650 |
|
7 |
|a Microelectromechanical systems.
|2 fast
|0 (OCoLC)fst01019745
|
650 |
|
7 |
|a Electrical & Computer Engineering.
|2 hilcc
|
650 |
|
7 |
|a Electrical Engineering.
|2 hilcc
|
650 |
|
7 |
|a Engineering & Applied Sciences.
|2 hilcc
|
700 |
1 |
|
|a Gianchandani, Yogesh B.
|
700 |
1 |
|
|a Tabata, Osamu,
|d 1956-
|
700 |
1 |
|
|a Zappe, Hans P.
|
776 |
0 |
8 |
|i Print version:
|t Comprehensive microsystems.
|d Amsterdam ; Oxford : Elsevier, �2008
|z 9780444521941
|w (OCoLC)76910691
|
856 |
4 |
0 |
|u https://sciencedirect.uam.elogim.com/science/referenceworks/9780444521903
|z Texto completo
|