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Thin film materials technology : sputtering of compound materials /

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...

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Détails bibliographiques
Cote:Libro Electrónico
Auteur principal: Wasa, Kiyotaka
Autres auteurs: Kitabatake, Makoto, Adachi, Hideaki
Format: Électronique eBook
Langue:Inglés
Publié: Norwich, NY : Heidelberg : William Andrew Pub. ; Springer, �2004.
Sujets:
Accès en ligne:Texto completo

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