Thin film materials technology : sputtering of compound materials /

Show other versions (1)

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key techn...

Full description

Bibliographic Details
Call Number:Libro Electrónico
Main Author: Wasa, Kiyotaka
Other Authors: Kitabatake, Makoto, Adachi, Hideaki
Format: Electronic eBook
Language:Inglés
Published: Norwich, NY : Heidelberg : William Andrew Pub. ; Springer, �2004.
Subjects:
Cathode sputtering (Plating process)
Thin films.
Pulv�erisation cathodique > Applications industrielles.
Couches minces.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Online Access:Texto completo

Internet

Texto completo

Items no disponibles

Holdings details from

Similar Items