Wasa, K., Kitabatake, M., & Adachi, H. (2004). Thin film materials technology: Sputtering of compound materials. William Andrew Pub. ; Springer.
Cita Chicago Style (17a ed.)Wasa, Kiyotaka, Makoto Kitabatake, y Hideaki Adachi. Thin Film Materials Technology: Sputtering of Compound Materials. Norwich, NY : Heidelberg: William Andrew Pub. ; Springer, 2004.
Cita MLA (8a ed.)Wasa, Kiyotaka, et al. Thin Film Materials Technology: Sputtering of Compound Materials. William Andrew Pub. ; Springer, 2004.
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