Handbook of VLSI microlithography : principles, technology, and applications /

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This handbook gives readers a look at the technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings - including optical lithography, electron beam, ion beam, and X-ray lithography. The book's main theme is the specia...

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Bibliographic Details
Call Number:Libro Electrónico
Other Authors: Helbert, John N.
Format: Electronic eBook
Language:Inglés
Published: Park Ridge, N.J. : Norwich, N.Y. : Noyes Publications ; William Andrew Pub., �2001.
Edition:2nd ed.
Series:Materials science and process technology series. Electronic materials and process technology.
Subjects:
Integrated circuits > Very large scale integration.
Microlithography.
Circuits int�egr�es �a tr�es grande �echelle.
Microlithographie.
TECHNOLOGY & ENGINEERING > Electronics > Circuits > General.
Handbook
Handbooks and manuals.
Guides et manuels.
Online Access:Texto completo
Table of Contents:
  • Issues and Trends Affecting Lithography Tool Selection Strategy
  • Resist Technology: Design, Processing and Applications
  • Lithography Process Monitoring and Defect Detection
  • Techniques and Tools for Photo Metrology
  • Techniques and Tools for Optical Lithography
  • Microlithography Tool Automation
  • Electron Beam ULSI Applications
  • Rational Vibration and Structural Dynamics for Lithographic Tool Installations
  • Applications of Ion Microbeam Lithography and Direct Processing
  • X-Ray Lithography.

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