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Nano-lithography /
Lithography is an extremely complex tool - based on the concept of "imprinting" an original template version onto mass output - originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and el...
| Call Number: | Libro Electrónico |
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| Other Authors: | |
| Format: | Electronic eBook |
| Language: | Inglés Francés |
| Published: |
London : Hoboken, N.J. :
ISTE ; Wiley,
2011.
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| Subjects: | |
| Online Access: | Texto completo (Requiere registro previo con correo institucional) |
Table of Contents:
- Ch. 1. X-ray lithography : fundamentals and applications
- ch. 2. NanoImprint lithography
- ch. 3. Lithography techniques using scanning probe microscopy
- ch. 4. Lithography and manipulation based on the optical properties of metal nanostructures
- ch. 5. Patterning with self-assembling block copolymers
- ch. 6. Metrology for lithography.