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Microfabrication for industrial applications /

This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industr...

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Détails bibliographiques
Cote:Libro Electrónico
Auteur principal: Luttge, Regina
Format: Électronique eBook
Langue:Inglés
Publié: Oxford ; Waltham, MA : William Andrew, 2011.
Collection:Micro & nano technologies.
Sujets:
Accès en ligne:Texto completo (Requiere registro previo con correo institucional)