Computational lithography /

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A Unified Summary of the Models and Optimization Methods Used in Computational Lithography. Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techniques (RETs), since t...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: Ma, Xu, 1983-
Other Authors: Arce, Gonzalo R.
Format: Electronic eBook
Language:Inglés
Published: Hoboken, N.J. : Wiley, ©2010.
Series:Wiley series in pure and applied optics.
Subjects:
Microlithography > Mathematics.
Integrated circuits > Design and construction > Mathematics.
Photolithography > Mathematics.
Semiconductors > Etching > Mathematics.
Resolution (Optics)
Microlithographie > Mathématiques.
Circuits intégrés > Conception et construction > Mathématiques.
Photolithographie > Mathématiques.
Semi-conducteurs > Attaque chimique > Mathématiques.
Résolution (Optique)
resolution (optical concept)
TECHNOLOGY & ENGINEERING > Electronics > Circuits > General.
Online Access:Texto completo (Requiere registro previo con correo institucional)

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