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Handbook of physical vapor deposition (PVD) processing /

This updated version of the popular handbook further explains all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the ne...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: Mattox, D. M.
Format: Electronic eBook
Language:Inglés
Published: Norwich, N.Y. : Oxford : William Andrew ; Elsevier Science [distributor], ©2010.
Edition:2nd ed.
Subjects:
Online Access:Texto completo