APA (7th ed.) Citation

Reinhardt, K. A., & Kern, W. (2008). Handbook of silicon wafer cleaning technology (2nd ed.). William Andrew.

Chicago Style (17th ed.) Citation

Reinhardt, Karen A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd ed. Norwich, NY: William Andrew, 2008.

MLA (8th ed.) Citation

Reinhardt, Karen A., and Werner Kern. Handbook of Silicon Wafer Cleaning Technology. 2nd ed. William Andrew, 2008.