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Handbook of contamination control in microelectronics : principles, applications, and technology /
Covers the basics of contamination control for the beginner, while also focusing in depth on critical issues of process engineering and circuit manufacturing for the more advanced reader. Stresses to readers that what makes the area of contamination control unique is its ubiquitous nature, across al...
| Clasificación: | Libro Electrónico |
|---|---|
| Otros Autores: | |
| Formato: | Electrónico eBook |
| Idioma: | Inglés |
| Publicado: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
©1988.
|
| Colección: | Materials science and process technology series.
|
| Temas: | |
| Acceso en línea: | Texto completo |
MARC
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| 245 | 0 | 0 | |a Handbook of contamination control in microelectronics : |b principles, applications, and technology / |c edited by Donald L. Tolliver. |
| 260 | |a Park Ridge, N.J., U.S.A. : |b Noyes Publications, |c ©1988. | ||
| 300 | |a 1 online resource (xxi, 488 pages) : |b illustrations | ||
| 336 | |a text |b txt |2 rdacontent | ||
| 337 | |a computer |b c |2 rdamedia | ||
| 338 | |a online resource |b cr |2 rdacarrier | ||
| 490 | 1 | |a Materials science and process technology series | |
| 520 | |a Covers the basics of contamination control for the beginner, while also focusing in depth on critical issues of process engineering and circuit manufacturing for the more advanced reader. Stresses to readers that what makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well-recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control. | ||
| 504 | |a Includes bibliographical references and index. | ||
| 506 | |3 Use copy |f Restrictions unspecified |2 star |5 MiAaHDL | ||
| 533 | |a Electronic reproduction. |b [Place of publication not identified] : |c HathiTrust Digital Library, |d 2010. |5 MiAaHDL | ||
| 538 | |a Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |u http://purl.oclc.org/DLF/benchrepro0212 |5 MiAaHDL | ||
| 583 | 1 | |a digitized |c 2010 |h HathiTrust Digital Library |l committed to preserve |2 pda |5 MiAaHDL | |
| 588 | 0 | |a Print version record. | |
| 590 | |a Knovel |b ACADEMIC - Electronics & Semiconductors | ||
| 650 | 0 | |a Integrated circuits |x Design and construction. | |
| 650 | 0 | |a Contamination (Technology) | |
| 650 | 0 | |a Microbial contamination. | |
| 650 | 6 | |a Circuits intégrés |x Conception et construction. | |
| 650 | 6 | |a Contamination. | |
| 650 | 7 | |a contamination. |2 aat | |
| 650 | 7 | |a Microbial contamination |2 fast | |
| 650 | 7 | |a Contamination (Technology) |2 fast | |
| 650 | 7 | |a Integrated circuits |x Design and construction |2 fast | |
| 700 | 1 | |a Tolliver, Donald L. | |
| 776 | 0 | 8 | |i Print version: |t Handbook of contamination control in microelectronics. |d Park Ridge, N.J., U.S.A. : Noyes Publications, ©1988 |z 0815511515 |w (DLC) 87031533 |w (OCoLC)17200306 |
| 830 | 0 | |a Materials science and process technology series. | |
| 856 | 4 | 0 | |u https://appknovel.uam.elogim.com/kn/resources/kpHCCMPAT1/toc |z Texto completo |
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