Computational lithography

Show other versions (2)
Bibliographic Details
Call Number:Libro Electrónico
Main Author: Ma, Xu, 1983-
Other Authors: Arce, Gonzalo R.
Format: Electronic eBook
Language:Inglés
Published: Oxford : Wiley-Blackwell, 2010.
Series:Wiley series in pure and applied optics.
Subjects:
Microlithography > Mathematics.
Integrated circuits > Design and construction > Mathematics.
Photolithography > Mathematics.
Semiconductors > Etching > Mathematics.
Resolution (Optics)
Electronic books.
Online Access:Texto completo

Internet

Texto completo

Error inesperado del formato de respuesta.
Holdings details from

Similar Items