Wafer fabrication : automated material handling systems /

Show other versions (1)

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research c...

Full description

Bibliographic Details
Call Number:Libro Electrónico
Main Author: Zhang, Jie, 1963 September 21- (Author)
Format: Electronic eBook
Language:Inglés
Published: Berlin ; Boston : Walter de Gruyter GmbH, [2018]
Subjects:
Semiconductor wafers > Automatic control.
Manufacturing processes > Automatic control.
Plaquettes à gravure en semi-conducteurs > Commande automatique.
Fabrication > Commande automatique.
TECHNOLOGY & ENGINEERING > Mechanical.
Online Access:Texto completo
Table of Contents:
  • Frontmatter
  • Preface
  • Contents
  • 1 Semiconductor wafer fabrication system
  • 2 Automated material handling systems in SWFSs
  • 3 Modeling methods of automated material handling systems in SWFSs
  • 4 Analysis of automated material handling systems in SWFSs
  • 5 Scheduling methods of automated material handling systems in SWFSs
  • 6 Scheduling in Interbay automated material handling systems
  • 7 Scheduling in Intrabay automatic material handling systems
  • 8 Integrated scheduling in AMHSs
  • 9 Scheduling Performance Evaluation of Automated Material Handling Systems in SWFSs
  • Index

Similar Items