Chargement en cours…
Wafer fabrication : automated material handling systems /
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research c...
| Cote: | Libro Electrónico |
|---|---|
| Auteur principal: | |
| Format: | Électronique eBook |
| Langue: | Inglés |
| Publié: |
Berlin ; Boston :
Walter de Gruyter GmbH,
[2018]
|
| Sujets: | |
| Accès en ligne: | Texto completo |