Wafer fabrication : automated material handling systems /

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This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research c...

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Bibliographic Details
Call Number:Libro Electrónico
Main Author: Zhang, Jie, 1963 September 21- (Author)
Format: Electronic eBook
Language:Inglés
Published: Berlin ; Boston : Walter de Gruyter GmbH, [2018]
Subjects:
Semiconductor wafers > Automatic control.
Manufacturing processes > Automatic control.
Plaquettes à gravure en semi-conducteurs > Commande automatique.
Fabrication > Commande automatique.
TECHNOLOGY & ENGINEERING > Mechanical.
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