Zhang, J. (2018). Wafer fabrication: Automated material handling systems. Walter de Gruyter GmbH.
Cita Chicago Style (17a ed.)Zhang, Jie. Wafer Fabrication: Automated Material Handling Systems. Berlin ; Boston: Walter de Gruyter GmbH, 2018.
Cita MLA (8a ed.)Zhang, Jie. Wafer Fabrication: Automated Material Handling Systems. Walter de Gruyter GmbH, 2018.
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