Thin film chemical vapor deposition in electronics : equipment, methodology, and thin film growth experience /

Bibliographic Details
Call Number:Libro Electrónico
Main Author: Vasilʹev, V. I͡U. (Vladislav I͡Urʹevich) (Author)
Format: Electronic eBook
Language:Inglés
Published: New York : Nova Publishers, [2014]
Series:Materials science and technologies series.
Subjects:
Thin film devices.
Integrated circuits > Design and construction.
Chemical vapor deposition.
Dispositifs à couches minces.
Circuits intégrés > Conception et construction.
Dépôt chimique en phase vapeur.
TECHNOLOGY & ENGINEERING > Mechanical.
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