Ultra clean processing of semiconductor surfaces XI : selected, peer reviewed papers from the 11th international symposium on ultra clean processing of semiconductor surfaces (UCPSS), September 17-19, 2012, Gent, Belgium /

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This volume covers various aspects of ultra-clean technology for the large-scale integration of semiconductors. These include cleaning and contamination control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing, as well as cleaning for semiconductor photo-voltaic applications....

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Détails bibliographiques
Cote:Libro Electrónico
Collectivité auteur: International Symposium on Ultra Clean Processing of Semiconductor Surfaces Ghent, Belgium
Autres auteurs: Heyns, Marc, Mertens, Paul, Meuris, Marc
Format: Électronique Actes de congrès eBook
Langue:Inglés
Publié: Durnten-Zurich, Switzerland : Trans Tech Publications Ltd., [2013]
Collection:Diffusion and defect data. Solid state phenomena ; v. 195.
Sujets:
Electrical engineering > Congresses.
Semiconductors > Surfaces > Congresses.
Génie électrique > Congrès.
Semi-conducteurs > Surfaces > Congrès.
SCIENCE > Physics > Electricity.
SCIENCE > Physics > Electromagnetism.
Electrical engineering
Semiconductors > Surfaces
Conference papers and proceedings
Accès en ligne:Texto completo

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