Silicon science and advanced micro-device engineering II : selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /

This special collection of 39 peer-reviewed papers imparts the latest findings related to silicon science and advanced micro-device engineering. The papers are grouped into the chapters: Materials Science; Chemical Science and Technology; Nano-Science and Technology; Photonic Devices and Technology;...

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Bibliographic Details
Call Number:Libro Electrónico
Corporate Authors: International Symposium on Silicon Science Kiryū-shi, Japan, International Conference on Advanced Micro-Device Engineering
Other Authors: Hanaizumi, Osamu, Unno, Masafumi, Miura, Kenta
Format: Electronic Conference Proceeding eBook
Language:Inglés
Published: Durnten-Zurich : Trans Tech Publications, 2012.
Series:Key engineering materials ; v. 497.
Subjects:
Silicon > Congresses.
Nanostructures > Congresses.
Microelectronics > Congresses.
Silicium > Congrès.
Nanostructures > Congrès.
Microélectronique > Congrès.
TECHNOLOGY & ENGINEERING > Mechanical.
Microelectronics
Nanostructures
Silicon
Conference papers and proceedings
Online Access:Texto completo
Description
Summary:This special collection of 39 peer-reviewed papers imparts the latest findings related to silicon science and advanced micro-device engineering. The papers are grouped into the chapters: Materials Science; Chemical Science and Technology; Nano-Science and Technology; Photonic Devices and Technology; Novel Measurement and System Technology; Information and Communication Engineering; thus offering an up-to-date overview of the subject matter.
Physical Description:1 online resource (311 pages) : illustrations (some color).
Bibliography:Includes bibliographical references and indexes.
ISBN:9783038136828
3038136824
ISSN:1662-9809 ;

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